 |
 |
|
  ABSPolyvinyl
Chloride Nylons
& Nylatron
|
Plastic Solutions for Semiconductor Industry Wafer Processing Components In wafer processing, high temperatures and exposure to aggressive chemicals dictate the use of the most advanced thermoplastics available today. Purity is also a critical concern. Products like Celazole?polybenzimidazole and Vespel?SP-l polyimide have very low levels of ionic impurities, making them safe for use in applications that directly contact wafer surfaces. Vespel?SP-l offers dimensional stability and retains its strength at high process temperatures. Even higher temperatures can be reached when Celazole?is being used. Celazole?is the highest temperature thermoplastic available today. It can operate in mechanical applications up to 430 with excursions possible to 540 In dry processing, the high temperatures and exposure to aggressive gas plasma, often requires the use of Celazole?or Vespel? SP-1. A series of high purity products that provide performance over a broad range of temperatures. See Tables I and II for more information regarding the purity of products. Table 1 - Ionic Impurities
Table 2 - Outgassing
Table 3 - Resistance to Chemicals
Many wafer handling applications require the use of static dissipative products to protect the wafers from static discharge. Examples of such applications are the combs on wafer boat transfer equipment. Electrical shock due to static discharge can confuse the transfer equipment and damage the wafers. Combs manufactured from Semitron TM ESD 225 dissipate static charges in a controlled manner.
|
|||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|